Patent · US Expired

Optical coupler having evanescent coupling region

US6944369B2 · kind B2 · utility

70Cited by
82References
71Claims
0Family size

Assignee

Inventor

Key dates

Filing dateFeb 12, 2002
Grant dateSep 13, 2005
Priority date—
Expiry dateSep 13, 2022

Classification

  • Technology area (CPC G)Physics
  • CPC primaryG02F2201/20
  • WIPO fieldOptics
  • WIPO sectorInstruments

Abstract

A method for forming a hybrid active electronic and optical circuit using a lithography mask. The hybrid active electronic and optical circuit comprising an active electronic device and at least one optical device on a Silicon-On-Insulator (SOI) wafer. The SOI wafer including an insulator layer and an upper silicon layer. The upper silicon layer including at least one component of the active electronic device and at least one component of the optical device. The method comprising projecting the lithography mask onto the SOI waver in order to simultaneously pattern the component of the active electronic device and the component of the optical device on the SOI wafer.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.