Patent · US Expired

Mass-sensitive sensor

US6945089B2 · kind B2 · utility

73Cited by

5References

8Claims

0Family size

Assignee

Forschungszentrum Karlsruhe GmbH · DE

Inventors

Nicole Barie · Blankenloch, DE
Ulrich Stahl · Hemsbach, DE
Michael Rapp · Seeheim-Jugenheim, DE

Key dates

Filing date	Apr 1, 2002
Grant date	Sep 20, 2005
Priority date	—
Expiry date	Apr 26, 2022

Classification

Technology area (CPC G)Physics
CPC primaryG01N2291/0423
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

In a mass-sensitive sensor consisting of an acoustic surface wave component on the basis of shear waves, the sensor includes a substrate with an active surface carrying two different layers, one which is a parylene layer of a thickness of between 0.2 and <1.6 μm, which has been produced on the substrate by a vacuum-based deposition method and is capable of generating Love waves and the second layer forms a utilization layer, which interacts with an analyte disposed in a medium contacting the utilization layer.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.