Mass flowmeter
US6945106B2 · kind B2 · utility
5Cited by
6References
16Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | May 10, 2004 |
| Grant date | Sep 20, 2005 |
| Priority date | — |
| Expiry date | May 13, 2024 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01F1/6847
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A mass flowmeter of the thermal type, having a planar, thin substrate with a sensing surface that can be brought into direct or indirect contact with a flowing fluid during a measurement, wherein electrically controllable heating elements and temperature sensor elements for determining a temperature difference are provided on the sensing surface by a planar technique. The substrate with its sensing surface is present in particular in a cavity of a module into which a feed line and a drain line for the fluid issue.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.