Exhaust gas recirculation system using absolute micromachined pressure sense die
US6945120B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | Aug 23, 2004 |
| Grant date | Sep 20, 2005 |
| Priority date | — |
| Expiry date | Oct 9, 2024 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01L27/005
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An absolute pressure sensor is disclosed that includes a plurality of pressure sense die and a hermetically sealed cover located above the plurality of pressure sense die. A carrier can be provided to which the pressure sense die are mounted by a cured adhesive. The carrier and the pressure sense die can be attached to a circuit board populated with a plurality of surface mounted components for electrical connection to the absolute pressure sensor. An ASIC can also be provided for digitally calibrating the pressure sense die with temperature compensation, wherein the ASIC automatically controls a plurality of output modes thereof during calibration.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.