Semiconductor and device nanotechnology and methods for their manufacture
US6946197B2 · kind B2 · utility
53Cited by
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19Claims
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Key dates
| Filing date | Feb 20, 2004 |
| Grant date | Sep 20, 2005 |
| Priority date | — |
| Expiry date | Feb 23, 2024 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T428/2982
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Device nanotechnology based on silicon wafers and other substrates is described. Methods for preparing such devices are discussed. The teachings allow integration of current semiconductor device, sensor device and other device fabrication methods with nanotechnology. Integration of nanotubes and nanowires to wafers is discussed. Sensors, electronics, biomedical and other devices are presented.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.