Solid-state rotational rate sensor device and method
US6946695B2 · kind B2 · utility
3Cited by
4References
17Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Aug 7, 2003 |
| Grant date | Sep 20, 2005 |
| Priority date | — |
| Expiry date | Nov 27, 2023 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01C19/56
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
The present invention provides a solid-state rotational rate sensor device formed by a thin-film for generating an electrical voltage output proportional to the rate of rotational motion. The precision thin-film piezoelectric elements are configured and arranged on a semi-rigid structure to detect rotation (such as pitch, roll, and yaw) while rejecting spurious noise created by vibration, thermal gradients, and electro-magnetic interference.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.