Segmented uniform energy megasonic transducer
US6946774B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Sep 13, 2004 |
| Grant date | Sep 20, 2005 |
| Priority date | — |
| Expiry date | Sep 13, 2024 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH04R23/00
- WIPO fieldAudio-visual technology
- WIPO sectorElectrical engineering
Abstract
A transducer comprising an acoustic energy generating means and a resonator. The acoustic energy generating means generates acoustic energy and is adapted for delivering an approximately uniform amount of acoustic energy to each unit of surface area on a substrate in a given time period when the substrate is rotating. The acoustic energy generating means has a surface area that is less than the surface area of the substrate, and may comprise two or more piezoelectric crystal segments that are separately controllable with respect to power and/or time. When assembled, the two more piezoelectric crystal segments give the acoustic energy generating means a rectangular shape, a wedge shape or a triangle shape. The resonator is attached to the acoustic energy generating means for transmitting the acoustic energy to the substrate.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.