Electron beam device with spacer
US6946786B2 · kind B2 · utility
9Cited by
9References
8Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Jun 19, 2002 |
| Grant date | Sep 20, 2005 |
| Priority date | — |
| Expiry date | Feb 7, 2023 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2329/866
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
An electron beam device comprising an electron source having an electron-emitting device, a member to be irradiated with an electron beam disposed opposite to the electron source, and an electrically conductive spacer disposed between the electron source and the member to be irradiated with the electron beam, is characterized in that an electrode is disposed along an end portion of the spacer on the electron source side, and the electrode is disposed inside a region of a surface of the end portion of the spacer which is directed toward the electron source side.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.