Method for increasing the spectral and spatial resolution of detectors

US6947133B2 · kind B2 · utility

Assignee

• Carl Zeiss Jena GmbH · DE

Inventors

• Ralf Wolleschensky · Jena, DE
• Gunter Moehler · Jena, DE
• Volker Gerstner · Jena, DE

Key dates

• Filing date: Aug 7, 2001
• Grant date: Sep 20, 2005
• Expiry date: Jan 17, 2022

Classification

• Technology area (CPC G): Physics
• CPC primary: G02B21/16
• WIPO field: Optics
• WIPO sector: Instruments

Abstract

A method of optical detection of characteristic quantities of an illuminated specimen comprising detecting a signal that is backscattered, reflected and/or fluoresced and/or transmitted from the specimen by a spatially resolving detector wherein radiation coming from the specimen is imaged on the detector, shifting the position of the radiation which is measured in a spatially resolved manner relative to the detector and determining intermediate values by an algorithm from the signals measured in different shifts for purposes of increasing the spatial resolution of the detector. An arrangement for performing the method is also disclosed.