High stroke pixel for a deformable mirror
US6947188B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Mar 18, 2003 |
| Grant date | Sep 20, 2005 |
| Priority date | — |
| Expiry date | Mar 18, 2023 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB81B2203/053
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A mirror pixel that can be fabricated using standard MEMS methods for a deformable mirror. The pixel is electrostatically actuated and is capable of the high deflections needed for spaced-based mirror applications. In one embodiment, the mirror comprises three layers, a top or mirror layer, a middle layer which consists of flexures, and a comb drive layer, with the flexures of the middle layer attached to the mirror layer and to the comb drive layer. The comb drives are attached to a frame via spring flexures. A number of these mirror pixels can be used to construct a large mirror assembly. The actuator for the mirror pixel may be configured as a crenellated beam with one end fixedly secured, or configured as a scissor jack. The mirror pixels may be used in various applications requiring high stroke adaptive optics.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.