Robust heterodyne interferometer optical gauge
US6947621B2 · kind B2 · utility
9Cited by
15References
18Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jan 22, 2002 |
| Grant date | Sep 20, 2005 |
| Priority date | — |
| Expiry date | May 5, 2023 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01B2290/60
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A method for performing optical signal and beam distribution in a heterodyne interferometer. A planar lightwave circuit is provided including a plurality of waveguide optical transmission elements and an input coupler and an output coupler arranged along the optical transmission elements. Optical pathlengths of the transmission elements are matched between the input coupler and the output coupler to compensate for thermal effects. Reference and measurement optical phases are determined employing the input coupler and the output coupler.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.