In situ module for particle removal from solid-state surfaces
US6949147B2 · kind B2 · utility
16Cited by
6References
10Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | May 13, 2004 |
| Grant date | Sep 27, 2005 |
| Priority date | — |
| Expiry date | May 13, 2024 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/67069
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
Apparatus and a method for removing particles from the surface of a substrate include determining respective position coordinates of the particles on the surface. A beam of electromagnetic energy is directed via an optical cleaning arm at the coordinates of each of the particles in turn, such that absorption of the electromagnetic energy at the surface causes the particles to be dislodged from the surface substantially without damage to the surface itself.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.