Interference measuring device
US6950195B2 · kind B2 · utility
Assignees
Inventors
Key dates
| Filing date | Mar 28, 2001 |
| Grant date | Sep 27, 2005 |
| Priority date | — |
| Expiry date | Jun 5, 2021 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/1514
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
In an interference measuring device, which includes: a coherent beam generating source; a sample to be measured; a lens system for forming an image of the sample to be measured on an observing plane; an interference element for splitting a coherent beam into two systems, and forming an interference image on the observing plane or a plane equivalent thereto; an image pickup element for picking up the interference image on the observing plane; and a calculating device having functions of capturing and storing the interference image converted to electric signals by the image pickup element, and determining the phase distribution changed by the sample to be measured from the interference image by calculation, wherein a means for removing the phase change distribution due to the interference element is provided.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.