Apparatus for producing semiconductor thin films on moving substrates
US6951584B2 · kind B2 · utility
1Cited by
7References
14Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Feb 12, 2003 |
| Grant date | Oct 4, 2005 |
| Priority date | — |
| Expiry date | Oct 22, 2023 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC30B19/062
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
An apparatus for producing semiconductor thin films in which the semiconductor thin films are allowed to grow on a plurality of substrates by dipping the plurality of substrates into a solution filled in a crucible, the solution containing a semiconductor as a solute, while moving the same in the solution. An angle between a direction of a normal line on a central portion of a growing surface of each substrate and the direction of the movement of the substrates is set to be in 87 degrees or less and the movement of the substrates generates a flow of the solution.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.