Method and system for high-speed, precise micromachining an array of devices

US6951995B2 · kind B2 · utility

Assignee

• GSI LUMONICS CORPORATION · US

Inventors

• Bruce L. Couch · Attleboro, US
• Jonathan S. Ehrmann · Sudbury, US
• Yun Fee Chu · Natick, US
• Joseph V. Lento · Methuen, US
• Shepard D. Johnson · Andover, US

Key dates

• Filing date: Mar 26, 2003
• Grant date: Oct 4, 2005
• Expiry date: Oct 21, 2023

Classification

• Technology area (CPC B): Performing Operations; Transporting
• CPC primary: B23K2103/50
• WIPO field: Machine tools
• WIPO sector: Mechanical engineering

Abstract

A method and system for high-speed, precise micromachining an array of devices are disclosed wherein improved process throughput and accuracy, such as resistor trimming accuracy, are provided. The number of resistance measurements are limited by using non-measurement cuts, using non-sequential collinear cutting, using spot fan-out parallel cutting, and using a retrograde scanning technique for faster collinear cuts. Non-sequential cutting is also used to manage thermal effects and calibrated cuts are used for improved accuracy. Test voltage is controlled to avoid resistor damage.