Compositions of transition metal species in dense phase carbon dioxide and methods of use thereof
US6953041B2 · kind B2 · utility
8Cited by
23References
48Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Oct 9, 2002 |
| Grant date | Oct 11, 2005 |
| Priority date | — |
| Expiry date | May 17, 2023 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/02052
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
Compositions useful for cleaning metal from a substrate or coating metal onto a substrate are described: Such compositions comprise (a) a densified carbon dioxide continuous phase; (b) a polar discrete phase in said carbon dioxide continuous phase; (c) a metal in said discrete phase (i.e., a metal removed from the substrate, or to be coated onto the substrate); (d) at least one ligand in said continuous phase, said discrete phase, or both said continuous and said discrete phase.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.