Wafer cassette, and liquid phase growth system and liquid-phase growth process which make use of the same
US6953506B2 · kind B2 · utility
2Cited by
7References
7Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Oct 18, 2001 |
| Grant date | Oct 11, 2005 |
| Priority date | — |
| Expiry date | Feb 11, 2022 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T117/1024
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A wafer cassette comprises a holding member having a depression corresponding to the shape of the substrate, and a cover having an opening smaller than the surface size of the substrate. The substrate is to be held in the depression by means of the holding member and the cover, and the substrate is to be covered at its one-side surface, side and all peripheral region of the other-side surface, with the holding member at its depression and with the cover at the edge of its opening. Also disclosed are a liquid-phase growth system and a liquid-phase growth process which make use of the wafer cassette.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.