Laser-based measuring apparatus for measuring an axial run-out in a cylinder of rotation and method for measuring the same utilizing opposing incident measuring light beams
US6954273B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jan 14, 2002 |
| Grant date | Oct 11, 2005 |
| Priority date | — |
| Expiry date | Jan 27, 2023 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01B2290/70
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A laser-based measuring apparatus divides a light beam from a laser light source into at least two light beams, passes the light beams through different optical paths from each other, recombines the light beams, has the light beams interfere with each other to generate interfered light, opto-electrically transduces the interfered light to an optical frequency, and measures the amount of travel of an object which changes an optical path length of a portion of an optical path based on the optical frequency. The measuring apparatus has a portion for generating at least two measuring light beams from the laser light source, two reflection planes included in an object moving on a measuring axis, arranged back-to-back to each other on the measuring axis, and an opposing incident optical system for directing the measuring light beams into the reflection planes, respectively, such that the measuring light beams oppose to each other on the measuring axis.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.