Foil leak detection chamber

US6955076B1 · kind B1 · utility

Assignee

• LEYBOLD VAKUUM GmbH · DE

Inventors

• Rudi Widt · Recklinghausen, DE
• Thomas Abelen · Cologne, DE

Key dates

• Filing date: Jul 6, 2000
• Grant date: Oct 18, 2005
• Expiry date: Jul 6, 2020

Classification

• Technology area (CPC G): Physics
• CPC primary: G01M3/3281
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

The invention relates to a chamber for the detection of leaks on foils (1). Said chamber comprises two frames (2, 3) which are connected together in an articulated manner, foils (4, 5) which are mounted on said frames, a test chamber (8) composed of the foils, a seal (12, 13, 18) arranged between the frames and at least one bore hole (7), preferably several bore holes, in at least one of the two frames (2, 3), which can be connected to the inlet of a vacuum pump (15, 16, 22). In order to improve the chamber's closing features, said chamber comprises an edge zone (14) wherein a vacuum can be created independently of the test chamber (8) and into which said bore holes (7) open out.