Pressure sensor
US6955089B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Oct 8, 2003 |
| Grant date | Oct 18, 2005 |
| Priority date | — |
| Expiry date | Oct 29, 2023 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01L19/0645
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A pressure sensor includes a casing having a pressure detection chamber, a diaphragm for receiving pressure of a measuring object and disposed on the casing, and a pressure detection element. The pressure detection chamber is filled with a liquid, and the diaphragm contacts the liquid. The pressure detection element is disposed in the pressure detection chamber to receive the pressure of the liquid. The diaphragm has a plate shape with a radius of R and includes a circumference and a center of the plate. The circumference is fixed to the casing. The diaphragm further includes a corrugate disposed concentrically with the center of the diaphragm and having a half circular cross-section and a top of the half circle. The top of the corrugate is disposed within a distance of 0.6 R from the center of the diaphragm.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.