Integrated particles sensor formed on single substrate using fringes formed by diffractive elements
US6956230B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | Sep 15, 2000 |
| Grant date | Oct 18, 2005 |
| Priority date | — |
| Expiry date | Mar 13, 2022 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2015/1493
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Integrated sensors are described using lasers on substrates. In one embodiment, a first sensor forms a laser beam and uses a quartz substrate to sense particle motion by interference of the particles with a diffraction beam caused by a laser beam. A second sensor uses gradings to produce an interference. In another embodiment, an integrated sensor includes a laser element, producing a diverging beam, and a single substrate which includes a first diffractive optical element placed to receive the diverging beam and produce a fringe based thereon, a scattering element which scatters said fringe beam based on particles being detected, and a second diffractive element receiving scattered light.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.