Graphical user interface for compliance monitoring in semiconductor wafer fabrication and method of operation
US6957114B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | Jun 16, 2003 |
| Grant date | Oct 18, 2005 |
| Priority date | — |
| Expiry date | Aug 26, 2023 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY02P90/02
- WIPO fieldIT methods for management
- WIPO sectorElectrical engineering
Abstract
A system and method is disclosed for allocating multi-function resources among a plurality of tasks within a process system in semiconductor wafer fabrication. A resource allocator allocates multi-function resources among tasks within a process system that executes at least one application process. The resource allocator comprises a monitoring controller, model of the process system, a resource allocation controller, and a compliance-monitoring viewer. The compliance-monitoring viewer is operable to display process system information to illustrate plan compliance, information visualized over a time period of years, months, days, hours, seconds, microseconds or the like.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.