Hydrogen gettering system
US6958260B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Aug 19, 2003 |
| Grant date | Oct 25, 2005 |
| Priority date | — |
| Expiry date | Aug 19, 2023 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T428/131
- WIPO fieldMaterials, metallurgy
- WIPO sectorChemistry
Abstract
A method, system and materials for use in hydrogen gettering in conjunction with microelectronic and microwave components that are generally hermetically sealed in an enclosure typically referred to as a “package”. Gettering materials that can be used include titanium with or without a hydrogen permeable coating or covering, alloys of zirconium-vanadium iron and zeolites and several ways to apply these materials to the package. In addition, the hydrogen permeable material can be used over a vent from the interior of the package to the exterior wherein hydrogen will escape from the package interior when the hydrogen concentration within the package is greater than without the package.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.