Patent · US Expired

Scanning microscope with a detector and light source for exciting an energy state in a specimen and module for a scanning microscope

US6958470B2 · kind B2 · utility

17Cited by
6References
17Claims
0Family size

Assignee

Inventor

Key dates

Filing dateFeb 6, 2002
Grant dateOct 25, 2005
Priority date
Expiry dateAug 28, 2022

Classification

  • Technology area (CPC G)Physics
  • CPC primaryG02B21/0072
  • WIPO fieldOptics
  • WIPO sectorInstruments

Abstract

The invention discloses a scanning microscope for optical measurement with high spatial resolution of a specimen point of a specimen, having a light source for emitting an exciting light beam suitable for exciting an energy state of the specimen; a detector for detection of the emitted light; and a stimulating light beam, coming from the light source, for generating stimulated emission of the specimen excited by the exciting light beam at the specimen point, the exciting light beam and the stimulating light beam being arranged in such a way that their intensity distributions in the focal region partially overlap, wherein optical elements which shape the stimulating light beam are combined into at least one module that is positionable in the beam path of the scanning microscope.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.