Method and apparatus for adjusting characteristics of multi electron source
US6958578B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | Aug 27, 2003 |
| Grant date | Oct 25, 2005 |
| Priority date | — |
| Expiry date | Aug 27, 2023 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG09G2320/0285
- WIPO fieldAudio-visual technology
- WIPO sectorElectrical engineering
Abstract
The electron emission characteristics and adjustment times of a multi electron source are made approximately equal with simple processes. A characteristics adjustment method for a multi electron source having a plurality of electron emitting devices disposed on a substrate, comprising the steps of measuring electron emission characteristics of each of the electron emitting devices and setting a characteristics adjustment target value, applying a plurality of characteristics shift voltages having discrete values to some of the electron emitting devices, measuring electron emission characteristics of each of the electron emitting devices, and creating a characteristics adjustment table for each of the characteristics shift voltage values in accordance with change rates of the measured electron emission characteristics, selecting a predetermined characteristics shift voltage value from the plurality of characteristics shift voltage values by referring to the characteristics adjustment table created for each of the electron emitting device and applying the predetermined characteristics shift voltage to the electron emitting device to shift the characteristics toward the characteristics…
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.