Optical modulator, method of achieving velocity matching and impedance matching of optical modulator, and method of manufacturing optical modulator
US6958852B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Dec 23, 2003 |
| Grant date | Oct 25, 2005 |
| Priority date | — |
| Expiry date | Dec 23, 2023 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02F1/0356
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A Mach-Zehnder optical waveguide is disposed in a substrate made of a material having an electro-optic effect. Coplanar-waveguide modulating electrodes are disposed on a principal surface of the substrate. A dielectric layer is disposed on a reverse surface of the substrate. A supporting substrate having a recess is disposed in contact with the dielectric layer such that the recess is located at a position corresponding to a modulating region. The relationship: ∈r>∈s is satisfied where ∈r represents the dielectric constant of the supporting substrate and ∈s represents the dielectric constant of the dielectric constant of solid, liquid, or gaseous substance in the recess.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.