Passive temperature compensation technique for MEMS devices
US6959583B2 · kind B2 · utility
9Cited by
23References
14Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Apr 30, 2002 |
| Grant date | Nov 1, 2005 |
| Priority date | — |
| Expiry date | Apr 30, 2022 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01C19/5719
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
In an exemplary embodiment, a MEMS sensor using a passive temperature compensation technique may provide an uncompensated sense output. Additionally, a circuit coupled to the MEMS sensor may include a diode having a voltage drop. A compensated sense output may be formed by combining the uncompensated sense output with a diode output that is proportional to the voltage drop across the diode.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.