Method for making a color image sensor with recessed contact apertures prior to thinning
US6960483B2 · kind B2 · utility
0Cited by
3References
4Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Aug 30, 2002 |
| Grant date | Nov 1, 2005 |
| Priority date | — |
| Expiry date | Aug 30, 2022 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10F39/199
Abstract
The invention relates to method for making a color image sensor. The method comprises: Furthermore:
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.