Method for structuring an OFET

US6960489B2 · kind B2 · utility

Assignee

• Siemens Aktiengesellschaft · DE

Inventors

• Adolf Bernds · Baiersdorf, DE
• Wolfgang Clemens · Puschendorf, DE
• Walter Fix · Fürth, DE
• Henning Rost · Erlangen, DE

Key dates

• Filing date: Aug 29, 2001
• Grant date: Nov 1, 2005
• Expiry date: Aug 29, 2021

Classification

• Technology area (CPC H): Electricity
• CPC primary: H10K71/13

Abstract

The invention relates to an organic field effect transistor, a method for structuring an OFET and an integrated circuit with improved structuring of the functional polymer layers. Structuring is achieved by scraping the functional polymer into a mold layer in which recesses are initially produced by exposure.