Method for examining a specimen, and scanning microscope system
US6961124B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Apr 26, 2002 |
| Grant date | Nov 1, 2005 |
| Priority date | — |
| Expiry date | Nov 7, 2022 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B2207/114
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A method for examining a specimen (27) that exhibits at least two optical transition lines and is optically excitable at least with light of a first and light of a second wavelength is characterized by the step of illuminating the specimen (27) with illuminating light (15) that generates at least a multiple of the first wavelength and a multiple of the second wavelength; and by the step of detecting the detected light (29) proceeding from the specimen (27).Also disclosed is a scanning microscope system (1) having at least one light source (3) that emits illuminating light (15) for illumination of a specimen (27), the specimen (27) exhibiting at least two optical transition lines and being optically excitable at least with light of a first and light of a second wavelength, having at least one detector (41, 43, 65, 77, 79) for detection of the detected light (29) proceeding from the specimen (27) and an objective (25) for focusing the illuminating light (15) onto a subregion of the specimen (27). The scanning microscope system is characterized in that the illuminating light (15) generates at least a multiple of the first wavelength and a multiple of the second wavelength.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.