System and method for allocating multi-function resources for a wetdeck process in semiconductor wafer fabrication
US6961634B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | May 28, 2003 |
| Grant date | Nov 1, 2005 |
| Priority date | — |
| Expiry date | May 28, 2023 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY02P90/02
- WIPO fieldIT methods for management
- WIPO sectorElectrical engineering
Abstract
A system and method is disclosed for allocating multi-function resources among a plurality of tasks within a wetdeck process in semiconductor wafer fabrication. A resource allocator allocates multi-function resources among tasks within a process system that executes at least one application process. The resource allocator comprises a monitoring controller, model of the process system and a resource allocation controller. The monitoring controller monitors measurable characteristics associated with the executing application process, multi-function resources and tasks. The model represents the multi-function resources and the tasks, and defines relationships among them. The resource allocation controller operates the model in response to the monitored measurable characteristics and allocates ones of the multi-function resources among ones of the tasks to efficiently execute the wetdeck process of the semiconductor wafer fabrication process.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.