Patent · US Expired

Capacitor structure and automated design flow for incorporating same

US6963122B1 · kind B1 · utility

20Cited by
8References
26Claims
0Family size

Assignee

Inventors

Key dates

Filing dateSep 5, 2003
Grant dateNov 8, 2005
Priority date
Expiry dateSep 5, 2023

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH01L2924/0002
  • WIPO fieldSemiconductors
  • WIPO sectorElectrical engineering

Abstract

A capacitive structure is described that comprises a first node and a second node. The first node comprises a first pair of vertically aligned strips that are electrically connected with one or more vias and a second pair of vertically aligned strips that are electrically connected with one or more vias. The higher strips of both of the pairs are at a same metal level and the lower strips of both of the pairs are at a same lower metal level. The second node comprises, at the metal level, a first metal structure having a pair of windows. A first of the windows surround and are isolated from a first of the higher strips. A second of the windows surround and are isolated from a second of the higher strips. The second node also comprises, at the lower metal level, a second metal structure having a pair of windows. A first of the windows surround and are isolated from a first of the lower strips. A second of the windows surround and are isolated from a second of the lower strips. The first and second metal structures are electrically connected with one or more vias.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.