Vacuum sensor
US6964187B2 · kind B2 · utility
1Cited by
16References
6Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Jan 31, 2002 |
| Grant date | Nov 15, 2005 |
| Priority date | — |
| Expiry date | Jan 31, 2022 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N19/10
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An apparatus and method for measuring the vapor or gas content of a vacuum chamber (1) by a vapor sensor (21) located in the fore-line of a vacuum system is provide. The gas or vapor content is determined by first providing a zero condition for the sensor using the vacuum pump (25) and them referencing the sensor response to the chamber gas during the evacuation cycle.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.