Organic metal precursor for use in forming metal containing patterned films
US6965045B2 · kind B2 · utility
5Cited by
2References
2Claims
0Family size
Assignee
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Key dates
| Filing date | Oct 29, 2002 |
| Grant date | Nov 15, 2005 |
| Priority date | — |
| Expiry date | May 28, 2023 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC07F15/065
- WIPO fieldOrganic fine chemistry
- WIPO sectorChemistry
Abstract
An organic metal precursors containing one or more organic ligands bonded to one or more metal atoms, wherein the organic ligand is rapidly dissociated from the metal atom upon exposure to light and degraded leaving a metal or a metal oxide. By using the organic metal precursors, an electroconductive, metal-containing patterned film can be easily deposited on a substrate at room temperature under atmospheric pressure without using photosensitive resins.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.