Pulse drive of resonant MEMS devices
US6965177B2 · kind B2 · utility
15Cited by
2References
32Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jun 15, 2004 |
| Grant date | Nov 15, 2005 |
| Priority date | — |
| Expiry date | Jun 15, 2024 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB81B2201/042
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
System and method for establishing and maintaining resonant oscillations of a torsional hinged device such as a pivotally hinged mirror. The system and methods comprise a permanent magnet mounted to the pivoting mirror that interacts with an electromagnetic coil. The magnetic coil is periodically connected and disconnected from a DC power supply in response to a series of drive pulses having a timing and duration such that the magnetic forces generated by the interaction of the permanent magnet and the electromagnetic coil maintains resonant oscillations of the device.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.