Thin film bulk acoustic resonator for controlling resonance frequency and voltage controlled oscillator using the same
US6965274B2 · kind B2 · utility
2Cited by
5References
8Claims
0Family size
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Key dates
| Filing date | Jun 23, 2003 |
| Grant date | Nov 15, 2005 |
| Priority date | — |
| Expiry date | Sep 3, 2023 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH03B5/30
- WIPO fieldBasic communication processes
- WIPO sectorElectrical engineering
Abstract
A thin film bulk acoustic resonator device is provided for minimizing phase noise by controlling resonance frequency. The thin film bulk acoustic resonator device comprises: a fixed body having a first electrode; a driving body having a second electrode installed to be adjacent to the fixed body and moved toward the fixed body due to voltage applied to the first and second electrodes; and a thin film bulk acoustic resonator for controlling the resonance frequency according to change of stress generated due to the movement of the driving body.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.