Resonator-type microelectronic pressure sensor that withstands high pressures
US6966228B2 · kind B2 · utility
14Cited by
11References
18Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Apr 25, 2002 |
| Grant date | Nov 22, 2005 |
| Priority date | — |
| Expiry date | Apr 25, 2022 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01L9/0019
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A microelectronic pressure sensor comprises a resonator (23) made on the basis of a crystalline material and secured to the inside of a package (24) made use of a cap (27) and a baseplate (26) for assembling one to the other. The cap (27) and the baseplate (26) are made completely or almost completely out of the same material as the resonator (23), and the pressure (Pe) to be detected is applied all around the package.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.