Microelectromechanical floating element flow sensor
US6966231B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Nov 4, 2003 |
| Grant date | Nov 22, 2005 |
| Priority date | — |
| Expiry date | Apr 14, 2024 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N13/00
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An electromechanical floating element shear-stress sensor, which may also be referred to as a flow rate sensor, having one or more transduction mechanisms coupled to a support arm of a floating element wafer such that the transduction mechanisms are normal to the force applied to a top surface of the floating element. The transduction mechanisms may be generally attached to a side surface of one or more arms supporting the floating element and may be coupled together and to a processor using one or more contacts extending from the backside of the floating element sensor. Thus, the floating element shear-stress sensor may have an unobstructed surface past which a fluid may flow. The floating element may also include a temperature sensing system for accounting for affects of temperature on the floating element system.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.