Gas reclaiming equipment
US6966934B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | Sep 29, 2000 |
| Grant date | Nov 22, 2005 |
| Priority date | — |
| Expiry date | May 3, 2023 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY02C20/30
- WIPO fieldChemical engineering
- WIPO sectorChemistry
Abstract
A gas reclaiming equipment capable of separating SF6 gas from a mixed gas efficiently and shortening reclaiming work under reduced pressure. A gas separation equipment is provided between a gas insulated equipment and a gas liquefaction system. The gas separation equipment separates nitrogen gas from the mixed gas, and concentrates SF6 gas. Only SF6 gas is sent into the gas liquefaction system. The gas separation equipment uses pressure swing adsorption using an adsorbent with selective adsorption. Moreover, a buffer tank for storing mixed gas is provided between the gas separation equipment and the gas insulated equipment. The buffer tank and the gas liquefaction system are connected by a reflux-line. The reflux-line refluxes the gas in a gas phase in the gas liquefaction system to the buffer tank. Furthermore, the gas separation equipment is connected to a storage tank. The storage tank accumulates the nitrogen gas separated with the gas separation equipment. The adsorbent to adsorb SF6 gas is enclosed in the storage tank for exhaust gas. To absorb decomposed gas, the filter has an adsorbent of the chemisorption type. The adsorbent has of a metal hydrate.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.