Mass spectrometers on wafer-substrates
US6967326B2 · kind B2 · utility
11Cited by
13References
24Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Feb 27, 2004 |
| Grant date | Nov 22, 2005 |
| Priority date | — |
| Expiry date | May 14, 2024 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J49/424
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
An apparatus includes a semiconductor or dielectric wafer-substrate and first and second multi-layer structures located over the wafer-substrate. The first multi-layer structure includes an ionizer or an electronic ion detector. The second multi-layer structure includes an ion trap having entrance and exit ports. The ionizer or electronic ion detector has a port coupled to one of the ports of the ion trap.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.