Method and apparatus for optical film measurements in a controlled environment

US6967715B2 · kind B2 · utility

Assignee

• International Business Machines Corporation · US

Inventors

• Richard J. Lebel · Williston, US
• Fredrik Maurer · Valhalla, US
• Paul Smith · Fort Collins, US
• Theodore G. van Kessel · Millbrook, US
• Hematha K. Wickramasinghe · Chappaqua, US

Key dates

• Filing date: Dec 6, 2002
• Grant date: Nov 22, 2005
• Expiry date: Aug 28, 2023

Classification

• Technology area (CPC G): Physics
• CPC primary: G01N2021/151
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

An optical probe (and method) for measuring a surface in an environment containing a first substance, includes a light source for transmitting a light onto an area of the surface to obtain a measurement, a source of the first substance including one of a fluid and a gas for displacing a second substance from an area of the surface receiving the light, and a measuring device for receiving the light being reflected from the surface and for determining a measurement of the surface based upon the reflected light.