Microelectrical mechanical structure (MEMS) optical modulator and optical display system
US6967761B2 · kind B2 · utility
70Cited by
53References
17Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jun 21, 2004 |
| Grant date | Nov 22, 2005 |
| Priority date | — |
| Expiry date | Jun 21, 2024 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH04N5/7416
- WIPO fieldAudio-visual technology
- WIPO sectorElectrical engineering
Abstract
A microelectrical mechanical out-of-plane thermal buckle-beam actuator is capable of providing transverse-plane movement of shutters. The actuator includes a pair of structural anchors secured to a substrate and one or more thermal buckle-beams secured at respective base ends to the anchors. Each buckle-beam extends substantially parallel to and spaced-apart from the substrate and is releasable from the substrate at points other than at the anchors. The thermal buckle-beam actuators are suitable for use in a microelectrical mechanical optical display system.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.