Electrostatic actuator with multilayer electrode stack
US6967806B2 · kind B2 · utility
4Cited by
12References
27Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | May 19, 2003 |
| Grant date | Nov 22, 2005 |
| Priority date | — |
| Expiry date | Sep 19, 2023 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG11B5/58
- WIPO fieldAudio-visual technology
- WIPO sectorElectrical engineering
Abstract
An electrostatic actuator for adjusting a spacing. A first body has an electrically conducting surface, and a second body has a body surface separated by the spacing from the electrically conducting surface. A conductor layer and an actuator electrode are recessed in the second body, and an electrode face faces the electrically conducting surface across the spacing. The actuator electrode comprises a semi-insulating material with a combination of electrical resistivity and thickness which prevents shorting of the conductor layer to the electrical conducting surface through a dielectric breakdown in the spacing.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.