Method of fabricating sub-micron hemispherical and hemicylidrical structures from non-spherically shaped templates
US6969472B2 · kind B2 · utility
14Cited by
7References
21Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Apr 25, 2001 |
| Grant date | Nov 29, 2005 |
| Priority date | — |
| Expiry date | Dec 4, 2022 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG11B7/00718
- WIPO fieldAudio-visual technology
- WIPO sectorElectrical engineering
Abstract
A method for manufacturing hemi-cylindrical and hemi-spherical micro structures is provided. A pattern is formed onto a substrate, and a layer of material is subsequently grown onto the substrate. Due to growth characteristics, the layer will form radially symmetric features when grown to an appropriate thickness.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.