Method and apparatus for reducing charge injection in control of MEMS electrostatic actuator array
US6970031B1 · kind B1 · utility
42Cited by
12References
20Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | May 28, 2004 |
| Grant date | Nov 29, 2005 |
| Priority date | — |
| Expiry date | Jun 26, 2024 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG09G2320/0219
- WIPO fieldAudio-visual technology
- WIPO sectorElectrical engineering
Abstract
A control circuit for a MEMS (Micro-Electro-Mechanical System) has a semiconductor switch which has a source, a drain and a gate, which is associated with a selected one of spatially arranged fixed and movable plates of a variable capacitor, and is arranged to selectively connect the selected one of the fixed and movable plates with a voltage source. A charge injection control circuit is associated with the semiconductor switch and attenuates current injection into the selected one of the fixed and movable plates of the capacitor.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.