Method of determining a best initial focal position estimate
US6970789B2 · kind B2 · utility
25Cited by
36References
12Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Feb 1, 2002 |
| Grant date | Nov 29, 2005 |
| Priority date | — |
| Expiry date | Oct 23, 2022 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B7/28
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
The invention provides a method for a method for determining a best initial focal position estimate for a current sample location on a substrate comprising multiple sample locations, comprising determining the best initial focal position estimate by using a result from one or more techniques selected from the group consisting of linear regression analysis of focal positions determined for at least two other sample locations on the substrate and quadratic regression analysis of focal positions determined for at least three other sample locations on the substrate.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.