Non-oxidizing electrode arrangement for excimer lamps
US6971939B2 · kind B2 · utility
1Cited by
13References
12Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | May 28, 2004 |
| Grant date | Dec 6, 2005 |
| Priority date | — |
| Expiry date | May 28, 2024 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J61/0675
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A non-oxidizing electrode arrangement for an excimer lamp that is formed by coating an electrode of the lamp with a layer of protective layer that prevents the electrode from oxidizing. The protective layer is preferably transparent and possesses a low permeability for oxygen (e.g., silicon oxide, magnesium fluoride, calcium fluoride). The interior of the excimer lamp is evacuated to a pressure level that is lower than the pressure level surrounding the excimer lamp at any time during the non-oxidizing electrode formation process in order to assist in preventing the excimer lamp from fracturing.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.