Patent · US Expired

MEMS-based, computer systems, clock generation and oscillator circuits and LC-tank apparatus for use therein

US6972635B2 · kind B2 · utility

31Cited by
7References
61Claims
0Family size

Assignee

Inventors

Key dates

Filing dateFeb 26, 2003
Grant dateDec 6, 2005
Priority date
Expiry dateFeb 26, 2023

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH03H2007/006
  • WIPO fieldBasic communication processes
  • WIPO sectorElectrical engineering

Abstract

MEMS-based, computer system, clock generation and oscillator circuits and LC-tank apparatus for use therein are provided and which are fabricated using a CMOS-compatible process. A micromachined inductor (L) and a pair of varactors (C) are developed in metal layers on a silicon substrate to realize the high quality factor LC-tank apparatus. This micromachined LC-tank apparatus is incorporated with CMOS transistor circuitry in order to realize a digital, tunable, low phase jitter, and low power clock, or time base, for synchronous integrated circuits. The synthesized clock signal can be divided down with digital circuitry from several GHz to tens of MHz—a systemic approach that substantially improves stability as compared to the state of the art. Advanced circuit design techniques have been utilized to minimize power consumption and mitigate transistor flicker noise upconversion, thus enhancing clock stability.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.