Approaching apparatus using spectral shift for sample-probe distance regulation
US6972851B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Aug 12, 2003 |
| Grant date | Dec 6, 2005 |
| Priority date | — |
| Expiry date | Jul 12, 2024 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01B11/00
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An approaching apparatus based on spectral shift is disclosed, which includes a broadband light source, an optical-guide unit, and an optical receiving unit. The broadband light source emits a broadband light with the first central wavelength to the optical-guide unit and illuminates a sample via a probe within the optical-guide unit. A generated broadband light of the second central wavelength goes back the optical-guide unit via the original optical path to reach the optical receiving unit. Then, the receiving unit calculates the distance between the probe and the sample based on the characteristic curve of the approaching distance vs. the deviation of the first central wavelength. The deviation is used for feedback control so that the displacement driver moves the probe to adjust the distance between the probe and the sample.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.