Patent · US Expired

Methods for conformal coating and sealing microchip reservoir devices

US6973718B2 · kind B2 · utility

168Cited by
44References
12Claims
0Family size

Assignee

Inventors

Key dates

Filing dateMay 30, 2002
Grant dateDec 13, 2005
Priority date
Expiry dateOct 7, 2022

Classification

  • Technology area (CPC Y)Emerging Cross-Sectional Technologies
  • CPC primaryY10T29/49155
  • WIPO fieldPharmaceuticals
  • WIPO sectorChemistry

Abstract

Methods are provided for conformally coating microchip devices and for sealing reservoirs containing molecules or devices in a microchip device. One method comprises (i) providing a substrate having a plurality of reservoirs having reservoir openings in need of sealing; (ii) loading reservoir contents comprising molecules, a secondary device, or both, into the reservoirs; and (iii) applying a conformal coating barrier layer, such as a vapor depositable polymeric material, e.g., parylene, onto the reservoir contents over at least the reservoir openings to seal the reservoir openings. Another method comprises vapor depositing a conformal coating material onto a microchip device having at least two reservoirs and reservoir caps positioned over molecules or devices stored in the reservoirs, and providing that the conformal coating does not coat or is removed from the reservoir caps.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.